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Journal of Applied Physics

Volumn 83, Issue 1, 1998, Pages 332-338

Deposition of SiNx: H thin films by the electron cyclotron resonance and its application to Al/SiNx:H/Si structures

(6) Garcia, S a Martil, I a Gonzalez Diaz, G a Castan, E b Duenas S b Fernandez, M c

a UNIVERSIDAD COMPLUTENSE DE MADRID (Spain)

b UNIVERSITY OF VALLADOLID (Spain)

c INSTITUTO DE CIENCIA DE MATERIALES DE MADRID (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000050064 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.366713 Document Type: Article

Times cited : (49)

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