Time-dependent diffusivity of boron in silicon oxide and oxynitride

Applied Physics Letters

Volumn 74, Issue 7, 1999, Pages 967-969

  Ellis, K A ^a,b   Buhrman, R A ^a  

^a Cornell University   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038454408     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123425     Document Type: Article

References (16)

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