A two-axis tip-tilt platform for x-ray interferometry

Measurement Science and Technology

Volumn 14, Issue 6, 2003, Pages 717-723

  Bergamin, A ^a   Cavagnero, G ^a   Durando, G ^a   Mana, G ^a   Massa, E ^a  

^a CNR   (Italy)

Author keywords

Atomic scale displacement metrology; Ultraprecision positioning control system; X ray interferometry

Indexed keywords

ERROR ANALYSIS; INTERFEROMETERS; X RAYS;

MICRODYNAMICS;

INTERFEROMETRY;

INTERFEROMETRY;

EID: 0038417252     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/14/6/303     Document Type: Article

References (15)

1. -9 relative uncertainty? Eur. Phys. J. B 9 225-32
2. Basile G et al 2000 Combined optical and x-ray interferometry for high-precision dimensional metrology Proc. R. Soc. A 456 701-29
3. Mana G 2002 Applications of x-ray interferometry in metrology and phase-contrast imaging Proc. SPIE 4900 257-68
4. Mana G, Vattaneo F and Zosi G 1989 Non-linear analysis of the elastic behaviour of a translation device for x-ray interferometry Metrologia 26 219-27
5. Bergamin A, Cavagnero G and Mana G 1993 Servo-positioning with picometer resolution Rev. Sci. Instrum. 64 168-73
6. Bergamin A, Cavagnero G and Mana G 1997 Scanning x-ray interferometry over a millimeter baseline IEEE Trans. Instrum. Meas. 46 576-9
7. Monteiro A F, Smith S T and Chetwind D 1996 A super-precision linear slideway with angular correction in three axes Nanotechnology 7 27-36
8. Leach R, Haycocks J, Jackson K, Lewis A, Oldfield S and Yacoot A 2001 Advances in traceable nanometrology at the National Physical Laboratory Nanotechnology 12 R1-6
9. Swyt D A 2001 Length and dimensional measurements at NIST J. Res. Natl Inst. Stand. Technol. 1062 1-23
10. Futami S, Furutani A and Yoshida S 1990 Nanometre positioning and its micro-dynamics Nanotechnology 1 31-7
11. Nomura T and Suzuki R 1992 Six-axis controlled nanometer-order positioning stage for microfabrication Nanotechnology 3 21-8
12. Otsuka J and Masuda T 1998 The influence of nonlinear spring behavior of rolling elements on ultraprecision positioning control systems Nanotechnology 9 85-92
13. Basile G, Bergamin A, Cavagnero A, Mana G, Vittone E and Zosi G 1991 Silicon lattice constant: limits in IMGC x-ray/optical interferometry IEEE Trans. Instrum. Meas. 40 98-102
14. Bergamin A, Cavagnero G and Mana G 1993 A displacement-angle interferometer with sub-atomic resolution Rev. Sci. Instrum. 64 3076-81
15. Basile G, Bergamin A, Cavagnero G, Mana G, Vittone E and Zosi G 1994 Measurement of the silicon (220) lattice spacing Phys. Rev. Lett. 72 3133-6