Processing and characterization of Pb(Zr, Ti)O3 thick films on platinum-coated silicon substrate derived from sol-gel deposition

Materials Chemistry and Physics

Volumn 75, Issue 1-3, 2002, Pages 71-75

  Wang, Zhihong ^a   Zhao, Changlei ^a   Zhu, Weiguang ^a   Tan, Ooi Kiang ^a   Liu, Weiguo ^a   Yao, Xi ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Ferroelectric thick films; PZT; Slurry; Sol gel

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; DEPOSITION; DIELECTRIC PROPERTIES; FERROELECTRIC MATERIALS; FILM PREPARATION; LEAD COMPOUNDS; LOW TEMPERATURE EFFECTS; MICROELECTROMECHANICAL DEVICES; PLATINUM; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SLURRIES; SOL-GELS; X RAY DIFFRACTION ANALYSIS;

FERROELECTRIC THICK FILMS;

THICK FILMS;

EID: 0037188146     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(02)00033-0     Document Type: Conference Paper

References (7)