Surfactant enhanced growth of thin Si films on CaF 2 /Si(1 1 1)

Applied Surface Science

Volumn 211, Issue 1-4, 2003, Pages 203-208

  Wang, C R ^a   Muller B H ^a   Bugiel, E ^a   Hofmann, K R ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

CaF 2; Molecular beam epitaxy; Silicon; Solid phase epitaxy; Surface energy; Surfactant

Indexed keywords

ANNEALING; CALCIUM COMPOUNDS; CRYSTAL MICROSTRUCTURE; DEPOSITION; EPITAXIAL GROWTH; EVAPORATION; FILM GROWTH; HIGH TEMPERATURE EFFECTS; INTERFACIAL ENERGY; MOLECULAR BEAM EPITAXY; SILICON; SURFACE ACTIVE AGENTS;

SOLID-PHASE EPITAXY;

THIN FILMS;

EID: 0038333176     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00227-7     Document Type: Article

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