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Volumn 18, Issue 11, 1996, Pages 1241-1255
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Development and characterisation of an XeCl excimer laser-generated soft-X-ray plasma source and its applications
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 33748249478
PISSN: 03926737
EISSN: None
Source Type: Journal
DOI: 10.1007/BF02453259 Document Type: Article |
Times cited : (27)
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References (25)
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