Residual stress and crystal orientation in magnetron sputtering Au films

Materials Letters

Volumn 57, Issue 20, 2003, Pages 3101-3106

  Tang, Wu ^a   Xu, Kewei ^a   Wang, Ping ^b   Li, Xian ^b  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b Xi'an Institute of Space Radio Technology   (China)

Author keywords

Au film; Crystal orientation; Residual stress

Indexed keywords

COMPRESSIVE STRESS; CRYSTAL ORIENTATION; GOLD; MAGNETRON SPUTTERING; RESIDUAL STRESSES; TEXTURES;

DIFFRACTION PEAKS;

THIN FILMS;

EID: 0038237680     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(03)00004-1     Document Type: Article

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