Effect of substrate temperature and heat treatment on the microstructure of diamondlike carbon films

Journal of Applied Physics

Volumn 79, Issue 4, 1996, Pages 1917-1925

  Bhargava, Sanjay ^a,e   Bist, H D ^a   Narlikar, A V ^b   Samanta, S B ^b   Narayan, J ^c   Tripathi, H B ^d  

^a INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

^b NATIONAL PHYSICAL LABORATORY   (India)

^c North Carolina State University   (United States)

^d KUMAUN UNIVERSITY   (India)

^e Government College   (India)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001439532     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361081     Document Type: Article

References (39)

1. J. Robertson, Surf. Coat. Technol. 50, 185 (1992).
2. B. Dischler, A. Bubenzer, and P. Koidl, Appl. Phys. Lett. 42, 636 (1983).
3. D. S. Knight and W. B. White, J. Mater. Res. 4, 385 (1989).
4. R. J. Nemanich, J. T. Glass, G. Lucovsky, and R. E. Shroder, J. Vac. Sci. Technol. A 6, 1783 (1988).
5. J. Wagner, M. Ramsteiner, Ch. Wild, and P. Koidl, Phys. Rev. B 40, 1817 (1989).
6. M. Yoshikawa, G. Katagiri, H. Ishida, A. Ishitani, and T. Akamatsu, J. Appl. Phys. 64, 6464 (1988).
7. W. S. Bacsa, J. S. Lannin, D. L. Pappas, and J. J. Cuomo, Phys. Rev. B 47, 10931 (1993).
8. D. Beeman, J. Silverman, R. Lynds, and M. R. Anderson, Phys. Rev. B 30, 870 (1984).
9. N. Wada, P. J. Gaczi, and S. A. Solin, J. Non-Cryst. Solids 35,36, 543 (1980).
10. J. Robertson and E. P. O Reilly, Phys. Rev. B 35, 2946 (1987).
11. M. A. Tamor and C. H. Wu, J. Appl. Phys. 67, 1007 (1990).
12. P. C. Kelires, Phys. Rev. B 47, 1829 (1993).
13. P. C. Kelires, Phys. Rev. Lett. 73, 2460 (1994).
14. B. Dischler, A. Bubenzer, and P. Koidl, Solid State Commun. 48, 105 (1983).
15. R. O. Dillon, J. A. Woollam, and V. Katkanant, Phys. Rev. B 29, 3482 (1984).
16. Q. Wang, D. D. Allred, and J. Gonzales-Hernandez, Phys. Rev. B 47, 6119 (1993).
17. J. N. Rouzaud, A. Oberlin, and C. Beny-Bassez, Thin Solid Films 105, 75 (1983).
18. G. Comelli, J. Stohr, C. J. Robinson, and W. Jark, Phys. Rev. B 38, 7511 (1988).
19. A. Reyes-Mena, J. Gonzalez-Hernandez, R. Asomoza, and B. S. Chao, J. Vac. Sci. Technol. A 8, 1509 (1990).
20. A. Rengan, S. M. Kanetkar, J. Narayan. J. L. Park, Li Ming, and S. Bedge, Mater. Sci. Eng. B 7, 278 (1992).
21. S. Bhargava, H. Joshi, H. D. Bist, and M. Aslam, J. Raman Spectrosc. 24, 417 (1993).
22. S. Bhargava, H. D. Bist, S. B. Samanta, A. V. Narlikar, A. Rengan, and J. Narayan, Solid State Commun. 90, 205 (1994).
23. B. Marchon, M. Salemeron, and W. Siekhaus, Phys. Rev. B 39, 12907 (1989).
24. F. Li and J. S. Lannin, Phys. Rev. Lett. 65, 1905 (1990).
25. J. M. Yanez-Limon, F. Ruiz, J. Gonzalez-Hernandez, C. Vazquez-Lopez, and E. Lopez-Cruz, J. Appl. Phys. 76, 3443 (1994).
26. F. Li and J. S. Lannin, Appl. Phys. Lett. 61, 2116 (1992).
27. C. Z. Wang and K. M. Ho, Phys. Rev. Lett. 71, 1184 (1993).
28. N. Laidani, R. Capelletti, M. Elena, L. Guzman, G. Mariotto, A. Miotello, and P. M. Ossi, Thin Solid Films 223, 114 (1993).
29. A. Richter, H.-J. Scheibe, W. Pompe, K.-W. Brezezinka, and I. Muhling, J. Non-Cryst. Solids 88, 131 (1986).
30. J. J. Cuomo, J. P. Doyle, J. Bruley, and J. C. Liu, J. Vac. Sci. Technol. A 9, 2210 (1991).
31. N. H. Cho, D. K. Veirs, J. W. Ager III, M. D. Rubin, C. B. Hopper, and D. B. Bogy, J. Appl. Phys. 71, 2243 (1992).
32. F. Tuinstra and J. L. Koenig, J. Chem. Phys. 53, 1126 (1970).
33. P. Bou and L. Vandenbulcke, J. Electrochem. Soc. 138, 2991 (1991).
34. B. Marcus, L. Fayette, M. Mermoux, L. Abello, and G. Lucazeau, J. Appl. Phys. 76, 3463 (1994).
35. S. R. P. Silva, G. A. J. Amaratunga, E. K. H. Salje, and K. M. Knowles, J. Mater. Sci. 29, 4962 (1994).
36. S. A. Solin and A. K. Ramdas, Phys. Rev. B 1, 1687 (1970).
37. J. Diaz, J. A. Martin Gago, S. Ferrer, F. Comin, L. Abello, and G. Lucazeau, Diamond Relat. Mater. 1, 824 (1992).
38. Y. K. Vohra and T. S. McCauley, Diamond Relat. Mater. 3, 1087 (1993).
39. S. Bhargava, S. Sathiah, H. D. Bist, G. S. Raghuvanshi, and J. Narayan, Proceedings of the XIV International Conference on Roman Spectroscopy, Hong Kong, 26-28 August 1994, edited by N.-T. Yu and X.-Y. Li (John Wiley & Sons Ltd., Chichester), p. 632.