Local identification and mapping of the C49 and C54 titanium phases in submicron structures by micro-Raman spectroscopy

Applied Physics Letters

Volumn 70, Issue 17, 1997, Pages 2262-2264

  De Wolf, I ^a   Howard, D J ^a   Lauwers, A ^a   Maex, K ^a   Maes, H E ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343150135     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118833     Document Type: Article

References (5)

1. K. L. Saenger, C. Cabrai, Jr., L. A. Clevenger, R. A. Roy, and S. Wind, J. Appl. Phys. 78, 7040 (1995).
2. R. A. Roy, L. A. Clevenger, C. Cabrai, Jr., K. L. Saenger, S. Brauer, J. Jordan-Sweet, J. Bucchignano, G. B. Stephenson, G. Morales, and K. F. Ludwig, Jr., Appl. Phys. Lett. 66, 1732 (1995).
3. J. Heyeongtag, C. A. Sukow, J. W. Honeycutt, G. A. Rozgonyi, and R. J. Nemanich, J. Appl. Phys. 71, 4629 (1992).
4. I. De Wolf, D. J. Howard, K. Maex, and H. E. Maes, Mater. Res. Soc. Symp. Proc. 427, (1996).
5. P. A. Temple and C. E. Hathaway, Phys. Rev. B 7, 3685 (1973).