Low-temperature crystallization of Sol-gel-derived Pb(Zr, Ti)O3 thin films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 9 B, 1999, Pages 5346-5349

  Fujimori, Yoshikazu ^a   Nakamura, Takashi ^a   Takasu, Hidemi ^a  

^a ROHM CO LTD   (Japan)

Author keywords

Ferroelectric thin film; Low temperature; Low pressure; PZT; Sol gel; Two step annealing

Indexed keywords

CRYSTALLIZATION; DIELECTRIC FILMS; FERROELECTRIC MATERIALS; HYSTERESIS; LEAD COMPOUNDS; LOW TEMPERATURE EFFECTS; PRESSURE EFFECTS; RAPID THERMAL ANNEALING; SOL-GELS; THIN FILM DEVICES;

LEAD ZIRCONATE TITANATE;

CAPACITORS;

EID: 0033339596     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.5346     Document Type: Article

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