Influence of a TiO2 adhesion layer on the structure and the orientation of a Pt layer in Pt/TiO2/SiO2/Si structures

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 5 A, 2003, Pages 2791-2795

  Abe, Norikazu ^a   Otani, Yohei ^a   Miyake, Masato ^a   Kurita, Masaaki ^a,b   Takeda, Hiroaki ^a   Okamura, Soichiro ^a   Shiosaki, Tadashi ^a  

^a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^b Technical Department   (Japan)

Author keywords

Adhesion layer; Electrode; FeRAM; Orientation; Platinum; TiO2

Indexed keywords

ADHESION; DEPOSITION; DIFFUSION; ELECTRODES; METALLIC FILMS; OXIDATION; PLATINUM; SILICON;

ADHESION LAYERS;

TITANIUM DIOXIDE;

EID: 0038042520     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.2791     Document Type: Article

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