Sputtered Pb(Zr, Ti)O3 thin films for ferroelectric capacitors

Materials Research Society Symposium - Proceedings

Volumn 596, Issue , 2000, Pages 277-282

  Sakoda, T ^a   Aoki, K ^a   Fukuda, Y ^a  

^a Texas Instruments Japan Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CAPACITORS; CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; ELECTRON BEAMS; EVAPORATION; FERROELECTRIC DEVICES; FERROELECTRICITY; LEAD COMPOUNDS; RAPID THERMAL ANNEALING; SPUTTERING; X RAY DIFFRACTION ANALYSIS;

ELECTRON BEAM EVAPORATION; FERROELECTRIC CAPACITORS; LEAD ZIRCONIUM TITANATE; POLARIZATION DENSITY;

THIN FILMS;

EID: 0033681311     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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