Profile coating of KB mirrors at the advanced photon source

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4782, Issue , 2002, Pages 104-112

  Liu, Chian ^a   Assoufid, L ^a   Macrander, A T ^a   Ice, G E ^b   Tischler, J Z ^b  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Ellipsometry; KB mirrors; LTP metrology; Microfocusing; Profile coating; Sputter deposition; X ray optics

Indexed keywords

COATINGS; ELLIPSOMETRY; MASKS; MIRRORS; PHOTONS; SPECTROSCOPIC ANALYSIS; SPUTTERING;

PROFILE COATINGS;

X RAY OPTICS;

EID: 0037965484     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.456298     Document Type: Conference Paper

References (18)

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