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Volumn 42, Issue 4 B, 2003, Pages 1897-1902

Quantum chemical molecular dynamics studies on the chemical mechanical polishing process of Cu surface

Author keywords

Accelerated quantum chemical molecular dynamics simulation; Chemical mechanical polishing; Computational chemistry; Cu; Surface reaction; Tight binding theory

Indexed keywords

CHEMICAL MECHANICAL POLISHING; COMPUTER SIMULATION; HYDROGEN PEROXIDE; MOLECULAR DYNAMICS; OXIDATION; PH EFFECTS; QUANTUM THEORY; SOLUTIONS; SUBSTRATES; SURFACE CHEMISTRY;

EID: 0037672159     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.1897     Document Type: Article
Times cited : (21)

References (31)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.