SCOPUS 정보 검색 플랫폼

Materials Science Forum

Volumn 426-432, Issue 3, 2003, Pages 2243-2248

Molecular dynamic simulation of AFM-based nano lithography process for fabrication of MEMS components

(4) Kim, Y S a Yang, S H a Kim, C I a Lea, S S b

a Kyungpook National University (South Korea)

b Pohang University of Science and Technology (POSTECH) (South Korea)

Author keywords

AFM; MEMS; Molecular Dynamics Simulation; Morse Potential; Nano Lithography

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; COPPER; CRYSTAL ORIENTATION; CRYSTALS; CUTTING; DEFORMATION; LITHOGRAPHY; MACHINING; MOLECULAR DYNAMICS; NANOSTRUCTURED MATERIALS;

SURFACE QUALITY;

MICROELECTROMECHANICAL DEVICES;

EID: 0037663315 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.426-432.2243 Document Type: Conference Paper

Times cited : (7)

References (21)

1
- 0003624965
- CRC press, U.S.A.
- B. Bhushan: Handbook of Micro/Nano triboloty (CRC press, U.S.A. 1995)
- (1995) Handbook of Micro/Nano Triboloty
- Bhushan, B.¹

2
- 0035157059
- Y. Yan, M. Yoshno, T. Kuriagawa: Mater. Sci. Eng. A297 (2001), p230
- (2001) Mater. Sci. Eng. , vol.A297 , pp. 230
- Yan, Y.¹ Yoshno, M.² Kuriagawa, T.³

3
- 0037537307
- MST News
- M. Werner et al.: Nanotechnology for applications in Microsystems (MST News, 2001)
- (2001) Nanotechnology for Applications in Microsystems
- Werner, M.¹

4
- 51149211586
- E.J. wan Loenen, D. Dijkkamp, A.J. Hoeven, J.M. Lenssinck, J. Dieleman: Appl. Phys. Lett. 55 (1989) p.1312
- (1989) Appl. Phys. Lett. , vol.55 , pp. 1312
- Wan Loenen, E.J.¹ Dijkkamp, D.² Hoeven, A.J.³ Lenssinck, J.M.⁴ Dieleman, J.⁵

5
- 6144290977
- H.J. Mamin, D. Rugar: Appl. Phys. Lett. 61 (1992) p. 1003
- (1992) Appl. Phys. Lett. , vol.61 , pp. 1003
- Mamin, H.J.¹ Rugar, D.²

6
- 0038551527
- www.gennano.com

7
- 0032159759
- S. Hu, A. Hamidi, S. Altmeyer, T. Koster, B. Spangenberg, H. Kurt: J. Vao. Sci. Tech. B 16 (1998) p.2822
- (1998) J. Vao. Sci. Tech. B , vol.16 , pp. 2822
- Hu, S.¹ Hamidi, A.² Altmeyer, S.³ Koster, T.⁴ Spangenberg, B.⁵ Kurt, H.⁶

8
- 0033313348
- A. Notargiacomo, V. Foglietti, E. Ciance, G. Capellini, M. Adami, P. Faraci, F. Evangelisti, C. Nicolin: Nanotechnology 10 (2000) p.458
- (2000) Nanotechnology , vol.10 , pp. 458
- Notargiacomo, A.¹ Foglietti, V.² Ciance, E.³ Capellini, G.⁴ Adami, M.⁵ Faraci, P.⁶ Evangelisti, F.⁷ Nicolin, C.⁸

9
- 0033979008
- M. Versen, B. Klehn, U. Kunze, D. Reuter, A.D. Wieck: Ultramicroscopy 82 (2000) p.159
- (2000) Ultramicroscopy , vol.82 , pp. 159
- Versen, M.¹ Klehn, B.² Kunze, U.³ Reuter, D.⁴ Wieck, A.D.⁵

10
- 0003576136
- John Wiley & Son, U.S.A.
- J.M. Haile: Molecular Dynamics Simulation (John Wiley & Son, U.S.A. 1992)
- (1992) Molecular Dynamics Simulation
- Haile, J.M.¹

11
- 0000791128
- U. Landman, W.D. Luedtke, N.A. Bumham, R.J. Colton: Science 248 (1990) p.454
- (1990) Science , vol.248 , pp. 454
- Landman, U.¹ Luedtke, W.D.² Bumham, N.A.³ Colton, R.J.⁴

12
- 0032483165
- R. Komanduri, N. Chandrasekaran, L.M. Raff: Wear 219 (1998) p.84
- (1998) Wear , vol.219 , pp. 84
- Komanduri, R.¹ Chandrasekaran, N.² Raff, L.M.³

13
- 0035467494
- Y.S. Kim, Y.M. Lee, D.Y. Choi, C.I. Kim: J. Mat. Sci. Tech. 17-5 (2001) p.547
- (2001) J. Mat. Sci. Tech. , vol.17 , Issue.5 , pp. 547
- Kim, Y.S.¹ Lee, Y.M.² Choi, D.Y.³ Kim, C.I.⁴

14
- 0037537255
- Y.S. Kim, D.Y. Choi, J.Y. Park: Metals Mater. 5-4 (1999) p.329
- (1999) Metals Mater. , vol.5 , Issue.4 , pp. 329
- Kim, Y.S.¹ Choi, D.Y.² Park, J.Y.³

15
- 0008108927
- K. Ueda, K. Iwata: Annals CIRP 41-1 (1980) p.65
- (1980) Annals CIRP , vol.41 , Issue.1 , pp. 65
- Ueda, K.¹ Iwata, K.²

16
- 0028136011
- S. Shimada, N. Ikawa, H. Tanaka, J. Uchikoshi: Annals CIRP 43-1 (1994) p.51
- (1994) Annals CIRP , vol.43 , Issue.1 , pp. 51
- Shimada, S.¹ Ikawa, N.² Tanaka, H.³ Uchikoshi, J.⁴

17
- 0037537258
- Springer-Verlagm, Germany
- W.B. Konig, N. Senrath: Progression Precision Engineering (Springer-Verlagm, Germany 1991)
- (1991) Progression Precision Engineering
- Konig, W.B.¹ Senrath, N.²

18
- 0034233069
- R. Komanduri, N. Chandrasekaran, L.M. Raff: Wear 242 (2000) p.60
- (2000) Wear , vol.242 , pp. 60
- Komanduri, R.¹ Chandrasekaran, N.² Raff, L.M.³

19
- 0037139263
- T. Fang: Surface Sci., 501 (2002) p.138
- (2002) Surface Sci. , vol.501 , pp. 138
- Fang, T.¹

20
- 0027097466
- T. Inamura, N. Takezawa: Annals CIRP 41-1 (1992) p.121
- (1992) Annals CIRP , vol.41 , Issue.1 , pp. 121
- Inamura, T.¹ Takezawa, N.²

21
- 0037537256
- Master Thesis (Kyungpook National University, Korea)
- J.S. Ahn : Master Thesis (Kyungpook National University, Korea 2002)
- 2002
- Ahn, J.S.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.