Gas sensing based on ellipsometric measurement on porous silicon

Physica Status Solidi (A) Applied Research

Volumn 197, Issue 2, 2003, Pages 518-522

  Arwin, H ^a   Wang, G ^a   Jansson, R ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ALCOHOLS; CHEMICAL SENSORS; DEPOSITION; ELLIPSOMETRY; OPTIMIZATION; ORGANIC SOLVENTS;

ALCOHOL VAPORS; METAL DEPOSITION; OPTICAL READOUT METHOD;

POROUS SILICON;

EID: 0037595484     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200306556     Document Type: Conference Paper

References (14)

1. P. A. Snow, E. K. Squire, and P. St. J. Russell, J. Appl. Phys. 86, 1781 (1999).
2. R. Bjorklund, S. Zangooie and H. Arwin, Appl. Phys. Lett. 69, 3001 (1997).
3. J. Gao, T. Gao, Y. Y. Li, M. J. Sailor, Langmuir (2000).
4. S. Zangooie, R. Bjorklund, and H. Arwin, J. Electrochem. Soc. 144, 4027 (1997).
5. R. Herino, G. Bomchil, K. Barla, and C. Bertrand, J. Electrochem. Soc. 134, 1994 (1987).
6. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
7. S. Zangooie, R. Bjorklund, and H. Arwin, Sens. Actuators B43, 168 (1997).
8. H. Arwin, Sens. and Actuators A92, 43 (2001).
9. H. Arwin, R. Jansson, and S. Welin-Kintström, J. Colloid Interface Sci. 156, 377 (1993).
10. H. Arwin, Thin Solid Films 377-378, 48 (2000).
11. G. Wang, H. Arwin, and R. Jansson, Appl. Opt. 42, 38 (2003).
12. J. W. P. Bakker, H. Arwin, G. Wang, and K. Järrendahl, phys. stat. sol. (a) 197, 378 (2003), this volume.
13. G. Wang, and H. Arwin, Sens. Actuators B85, 95 (2003).
14. T. Tsuboi, T. Sakka, and Y. Ogata, Appl. Surf. Sci. 147, 6 (1999).