Ion beam synthesis of diamond-SiC-heterostructures

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 1241-1245

  Weishart, H ^a   Heera, V ^a   Eichhorn, F ^a   Pecz B ^b   Barna, A ^b   Skorupa, W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

Diamond crystal; Electrical conductivity; Ion bombardment; Silicon carbide

Indexed keywords

ANNEALING; HETEROJUNCTIONS; HIGH RESOLUTION ELECTRON MICROSCOPY; INFRARED SPECTROMETERS; ION BEAMS; NANOSTRUCTURED MATERIALS; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

DEFECT CONDUCTION;

DIAMONDS;

DIAMOND;

EID: 0037514575     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00225-X     Document Type: Article

References (18)

1. Madapura, S., Steckl, A. J., & Loboda, M. (1999). J. Electrochem. Soc.. 146 1197.
2. Pensl, G., & Helbig, R. (1990). Festkörperprobleme/Adv. Solid State Phys.. 30 133.
3. Sonntag, H., & Kalbitzer, S. (1995). Appl. Phys. A Mater. Sci. Process. 61 363.
4. Rao, M. V., Nordstrom, D., & Gardner, J. A. et al. (1997). Nucl. Instrum. Methods B. 127 655.
5. Kalish, R. (2001). Diamond Relat. Mater.. 10 1749.
6. Skorupa, W. (1995). Physical and Technical Problems of SOI Structures and Devices. In J. P. Colinge (Ed.), 39-54. Dordrecht: Kluwer Academic.
7. McHargue, C. J., & Williams, J. M. (1993). Nucl. Instrum. Methods Phys. Res. B. 80/81 889-894.
8. Wesch, W., Heft, A., Wendler, E., Bachmann, T., & Glaser, E. (1995). Nucl. Instrum. Methods Phys. Res. B. 96 335.
9. Edmond, J. A., Davis, R. F., & Withrow, S. P. (1989). Ceram. Trans.. 2 479.
10. Heera, V., Fontaine, F., Skorupa, W., Pecz, B., & Barna, A. (2000). Appl. Phys. Lett.. 77 226.
11. Pécz B., Barna, Á Heera, V., Fontaine, F., & Skorupa, W. (2001). Mater. Sci. Forum. 353-356 199.
12. Sato, S., & Iwaki, M. (1988). Nucl. Instrum. Methods Phys. Res. B. 32 145.
13. Baskin, E., Reznik, A., Saada, D., Adler, J., & Kalish, R. (2001). Phys. Rev. B. 64 4110.
14. Ziegler, J. F., Biersack, J. P., & Littmark, U. (1985). The Stopping and Range of Ions in Solids. 1 New York: Pergamon.
15. Hausmann, S., Bischoff, L., Teichert, J., Voelskow, M., & Moeller, W. (2000). J. Appl. Phys.. 87 57.
16. Hausmann, S., Bischoff, L., & Teichert, J. et al. (1998). Appl. Phys. Lett.. 72 2719.
17. Chen, A. B., & Srichaikul, P. (1997). Phys. Stat. Sol. B. 202 81.
18. Uzan-Saguy, C., Cytermann, C., Brener, R., Richter, V., Shaanan, M., & Kalish, R. (1995). Appl. Phys. Lett.. 67 1194.