Dose rate effects in focused ion beam synthesis of cobalt disilicide

Applied Physics Letters

Volumn 72, Issue 21, 1998, Pages 2719-2721

  Hausmann, Stephan ^a   Bischoff, Lothar ^a   Teichert, Jochen ^a   Voelskow, Matthias ^a   Grambole, Dieter ^a   Herrmann, Folker ^a   Möller, Wolfhard ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000138783     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121110     Document Type: Article

References (18)

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