Dwell-time related effects in focused ion beam synthesis of cobalt disilicide

Journal of Applied Physics

Volumn 87, Issue 1, 2000, Pages 57-62

  Hausmann, Stephan ^a   Bischoff, Lothar ^a   Teichert, Jochen ^a   Voelskow, Matthias ^a   Möller, Wolfhard ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002105256     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371826     Document Type: Article

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