Co-dot-array formation along scratches on Si(1 1 1) surface by electroless deposition

Microelectronics Journal

Volumn 34, Issue 5-8, 2003, Pages 607-609

  Kim, Changman ^a   Oikawa, Yasushi ^a   Shin, Jaesoo ^b   Ozaki, Hajime ^a  

^a WASEDA UNIVERSITY   (Japan)

^b Daejeon University   (South Korea)

Author keywords

Co dot array; Electroless deposition; Scanning probe microscope

Indexed keywords

ARGON; COBALT; ELECTROLESS PLATING; NITROGEN COMPOUNDS; OXYGEN; SOLUTIONS;

SCANNING PROBE MICROSCOPES;

SILICON WAFERS;

EID: 0037505413     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(03)00060-0     Document Type: Conference Paper

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