SCOPUS 정보 검색 플랫폼

Volumn 162, Issue 2-3, 2003, Pages 276-287

Multilayer nitride coatings by closed field unbalanced magnetron sputter ion plating

(10) Cooke, K E a Bamber, M b Bassas, J c Boscarino, D d Derby, B b Figueras, A e Inkson, B J f Rigato, V g Steer, T f Teer, D G a

a TEER COATINGS LTD (United Kingdom)

b UNIVERSITY OF MANCHESTER (United Kingdom)

c UNIVERSITY OF BARCELONA (Spain)

d Thin Films Srl (Italy)

e UNIVERSITAT AUTÒNOMA DE BARCELONA (Spain)

f UNIVERSITY OF OXFORD (United Kingdom)

g SEZIONE DI PADOVA (Italy)

Author keywords

Closed field; Magnetron sputtering; Multilayer coatings; Nitrides

Indexed keywords

ADHESION; BACKSCATTERING; DEPOSITION; HARDNESS; INDENTATION; MAGNETRON SPUTTERING; MICROSTRUCTURE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

SCRATCH TESTING;

CERAMIC COATINGS;

COATING; MICROSTRUCTURE; NITRIDING; STRUCTURAL ANALYSIS;

EID: 0037454537 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(02)00668-0 Document Type: Article

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