Mechanical and surface analysis of Ti0.4Al0.6N/Mo multilayers

Vacuum

Volumn 60, Issue 3, 2001, Pages 339-346

  Tavares, C J ^a   Rebouta, L ^a   Andritschky, M ^a   Guimaraes F ^a   Cavaleiro, A ^b  

^a UNIVERSITY OF MINHO   (Portugal)

^b UNIVERSITY OF COIMBRA   (Portugal)

Author keywords

Adhesion; AFM; Multilayers; Residual stress; Roughness; Ultramicrohardness

Indexed keywords

ADHESION; ELECTRIC POTENTIAL; MAGNETRON SPUTTERING; MICROHARDNESS; MOLYBDENUM; MULTILAYERS; RESIDUAL STRESSES; SPUTTER DEPOSITION; STAINLESS STEEL; SURFACE ROUGHNESS; TEXTURES; TITANIUM NITRIDE;

ULTRAMICROHARDNESS;

PROTECTIVE COATINGS;

EID: 0034830424     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00413-9     Document Type: Article

References (25)

1. Ma KJ, Bloyce A, Bell T. Surf Coat Technol 1995;76-77:297.
2. Donahue LA, Cawley J, Lewis DB, Brooks JS, Münz W-D. Surf Coat Technol 1995;76-77:149.
3. Münz W-D. Surf Coat Technol 1993;58:20.
4. Chu X, Barnett SA, Wong MS, Sproul WD. Surf Coat Technol 1993;57:13.
5. Sundgren JE, Birch J, Kakansson G, Hultman L, Helmersson U. Thin Solid Films 1990;193-194:818.
6. Santhanam AT, Quinto DT. In: Coteh CM, Sprague JA, Smidt FA Jr, editors. ASM handbook, Vol. 5: surface engineering. ASM International, 1996. p. 905.
7. Quinto DT. J Vac Sci Technol 1998;A6:2149.
8. Silva MF, Silva MR, Alves EJ, Melo AA, Soares JC, Winand J, Vianden R. In: Kossowsky R, Singhal S, editors. Surface engineering. NATO ASI, Nijhoff: Les Arcs, 1984. p. 74.
9. Doolittle LR. Nucl Instr and Meth 1985;A9:344.
10. Gu YS, Chai WP, Mai ZH, Zhao JG. Phys Rev B 1994;50:6119.
11. Tavares CJ, Rebouta L, Almeida B, Sousa JB. Surf Coat Technol 1998;100-101:65.
12. Pharr GM, Oliver WC. MRS Bulletin, July 28,1992.
13. Tavares CJ, Rebouta L, Andntschky M, Ramos S. J Mat Proc Technol 1999;92-93:177.
14. Burnett PJ, Rickerby DS. Thin Solid Films 1987;54:403.
15. Larsson M, Hedenqvist P, Hogmark S. Surf Engng 1996;12(1):43.
16. Kumagai HY. 9th International Conference on CVD. The Electrochem Soc 1984. p. 189.
17. Perry AJ. J Vac Sci Technol 1990;A8(3):1351.
18. Stoney GG. Proc R Soc London 1909;A82:172.
19. Smithels CJ. Metals reference book, 5th ed. London: Butterworth, 1976. p. 975.
20. Fullerton EE, Schuller IK, Bruynseraede Y. MRS Bulletin, December 33, 1992.
21. Tavares CJ, Rebouta L, Alves EJ. Thin Solid Films 2000;373(1-2):287.
22. Petrov I, Hultman L, Sundgren J-E, Greene JE. J Vac Sci Technol 1992;A10:265.
23. Chu X, Barnett S. J Appl Phys 1995;77(9):4403.
24. Rickerby DS. J Vac Technol 1986;A4:2809.
25. Thornton JA. J Vac Technol 1986;A4:3059.