Surface topography development and ion mixing in the study of depth profiling of multilayered structures

Vacuum

Volumn 55, Issue 1, 1999, Pages 51-58

  Galdikas, A ^a,b  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b LITHUANIAN ENERGY INSTITUTE   (Lithuania)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; SPUTTERING; SURFACE ROUGHNESS;

DEPTH PROFILING; ION MIXING;

MULTILAYERS;

EID: 0033212250     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(99)00123-2     Document Type: Article

References (31)

1. Moon DW, Kim KJ. J Vac Sci Technol A 1996;14(5):2744.
2. Wittmark K. In: Topics in applied physics, vol. 64, Sputtering by Particle Bombardment III, Behrisch R, Wittmark K, editors. Berlin: Springer, 1991:161.
3. Menyhard M, Barna A, Biersack JP, Järrendahl K, Sundgren J-E. J Vac Sci Technol A 1995;13(4):1999.
4. Carter G. Vacuum 1984;34(10,11):819.
5. Koponene I, Hautala M, Scievanen O-P. Phys Rev Lett 1997;78(13):2612.
6. Ballone P, Rubini S. Phys Rev Lett 1996;77(15):3169.
7. Satori K, Haga Y, Minatoya R, Aoki M, Kajiwara K. J Vac Sci Technol A 1997;15(3):478.
8. Bradley RM. Phys Rev E 1996;54(6):6149.
9. Wittmaack K. In: Misaelides P, editor. Application of particle and laser beams in materials technology, NATO ASI Series, Series E, vol. 283, Dordrecht: Kluwer Academic Publishers, 1995:133.
10. Bradley RM, Cirlin EH. Appl Phys Lett 1996;68(26):3722.
11. Carter, G. Appl Phys Lett 1997;71(21):3066.
12. Mayer T, Chason E, Howard AJ. J Appl Phys 1994;76(3):1633.
13. Praneviěius L. Coatings Technology: Ion Beam Deposition. Warwick, Rhode Island: Satas and Associates, 1993:453.
14. Riviere J-P. In: Misaelides, editor. Application of particle and laser beams in materials technology, NATO ASI Series, Series E, vol. 283. Dordrecht: Kluwer Academic Publishers, 1995:257.
15. Nastasi M, Mayer JW. Mater Sci Engng 1994;R12(1):1.
16. Kelly R, Miotelo A. In: Pauleau Y, editors. Materials and processes for surface and interface engineering, NATO ASI Series, vol. 290. Dordrecht: Kluwer Academic Publishers, 1994:67.
17. Conrad J, Bolse W, Lieb KP, Weber T. Surf Coat Technol 1995;74-75:941.
18. Bolse W. Mater Sci Engng 1994;R12(2):53.
19. Marton D, Fine J. Chambers GP. Phys Rev Lett 1988;61(23):2697.
20. Marton D, Fine J. Surf Sci 1995;392:285.
21. Galdikas A, Pranevičius L, Templier C. Appl Surf Sci. 1996;103:471.
22. Galdikas A, Pranevičius L, Templier C. Computational Mater Sci 1998;10:134.
23. Miotello A, Kelly R. Surf Sci 1995;392:289.
24. Tamovic N, Tamovic L, Fine J. Nucl Instr and Meth B 1992;67:491.
25. Zalar A, Hofmann S, Pimentel F, Kohl D, Panjan P. Vacuum 1995;46(8-10):1077.
26. Menyhard M, Barna A, Sulyok A, Järrendahl K, Sundgren J-E, Biersack JP. Nucl Instr and Meth 1994;B85:383.
27. Linday J, Kliment V, Vogrinčič P, Tomel S. Vacuum 1995;46(1):53.
28. Menyhard M, Barna A, Biersack JP, J Vac Sci Technol A 1994;12(4):2368.
29. Sigmund P. In: Behrish R, editor. Topics in applied physics, vol. 47, Sputtering by Particle Bombardment I. Berlin: Springer, 1981:9.
30. Andreev SS, Akhsakhalyan AD, Drozdov MN, Polushkin NI, Slashchenko NN. Thin Solid Films 1995;263:169.
31. Stepanova MG. Surf Interface Anal 1996;24:416.