Preparation of Y2O3 thin films deposited by pulse ultrasonic spray pyrolysis

Materials Chemistry and Physics

Volumn 78, Issue 2, 2003, Pages 542-545

  Wang, Sheng Yue ^a   Lu, Zu Hong ^a  

^a SOUTHEAST UNIVERSITY   (China)

Author keywords

Spray pyrolysis; Thin film; Yttrium oxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; PYROLYSIS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); ULTRASONIC APPLICATIONS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; YTTRIUM COMPOUNDS;

ULTRASONIC SPRAY PYROLYSIS;

THIN FILMS;

EID: 0037449983     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(02)00350-4     Document Type: Article

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