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Applied Surface Science

Volumn 208-209, Issue 1, 2003, Pages 322-326

Comparative study on methods to structure sapphire

(4) Crunteanu, A a Hoffmann, P a Pollnau, M a Buchal, Ch b

a EPFL (Switzerland)

b FORSCHUNGSZENTRUM JÜLICH (Germany)

Author keywords

Ion beam implantation; Laser microstructuring; Reactive ion etching; Sapphire

Indexed keywords

ION IMPLANTATION; LASER ABLATION; LASERS; POLYIMIDES; REACTIVE ION ETCHING; SURFACE ROUGHNESS; TITANIUM; WAVEGUIDES; INTERFEROMETRY; ION BEAMS; MICROSTRUCTURE; ULTRASHORT PULSES;

LASER MICROSTRUCTURING;

SAPPHIRE;

EID: 0037443248 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(02)01382-X Document Type: Conference Paper

Times cited : (15)

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