Interaction of UV laser light with wide band gap materials: Mechanisms and effects

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 141, Issue 1-4, 1998, Pages 709-718

  Pedraza, A J ^a  

^a University of Tennessee   (United States)

Author keywords

Excimer lasers; Insulators; Laser ablation; Laser materials; Laser radiation effects; Surface treatments

Indexed keywords

ALUMINA; ENERGY GAP; EXCIMER LASERS; HEAT TRANSFER; LASER ABLATION; LASER BEAM EFFECTS; SEMICONDUCTOR MATERIALS; SILICA; SURFACE TREATMENT; ULTRAVIOLET RADIATION;

WIDE BAND GAP MATERIALS;

CERAMIC MATERIALS;

EID: 0032068449     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00122-0     Document Type: Article

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