On the single-chip condenser miniature microphone using DRIE and backside etching techniques

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 42-47

  Chen, Jing ^a   Liu, Litian ^a   Li, Zhijian ^a   Tan, Zhimin ^a   Xu, Yang ^a   Ma, Jun ^b  

^a TSINGHUA UNIVERSITY   (China)

^b INSTITUTE OF ACOUSTICS   (China)

Author keywords

Backside etching techniques; DRIE etching techniques; Single chip condenser miniature microphone

Indexed keywords

CAPACITORS; ELECTRIC POTENTIAL; ELECTROSTATICS; ETCHING; FINITE ELEMENT METHOD; RESIDUAL STRESSES; SENSITIVITY ANALYSIS; SINGLE CRYSTALS;

CONDENSER MINIATURE MICROPHONES;

MICROPHONES;

EID: 0037439052     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00326-6     Document Type: Conference Paper

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