A study on corrugated diaphragms for high-sensitivity structures

Journal of Micromechanics and Microengineering

Volumn 7, Issue 4, 1997, Pages 310-315

  Zou, Quanbo ^a   Wang, Zhenfeng ^a   Lin, Rongming ^a   Yi, Sung ^a   Gong, Haiqing ^a   Lim, Mongking ^a   Li, Zhijian ^b   Liu, Litian ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; COMPUTER SIMULATION; DIAPHRAGMS; ETCHING; FINITE ELEMENT METHOD; PRESSURE TRANSDUCERS;

CORRUGATED DIAPHRAGMS; HIGH SENSITIVITY STRUCTURES; SILICON ANISOTROPIC ETCHING;

MICROMACHINING;

EID: 0031339461     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/4/006     Document Type: Article

References (10)

1. Mastrangelo C H, Xia Zhang and Tang W C 1996 Surface-micromachined capacitive differential pressure sensor with lithographically defined silicon diaphragm J. Microelectromech. Syst. 5 98-105
2. Lshikura Y, Kimura S and Fukiura T 1992 A thin film capacitive pressure sensor Tech. Dig. 11th Sensor Symp. pp 149-52
3. Sessler G M 1991 Acoustic sensors Sensors Actuators A 25-27 323-30
4. Scheeper P R 1994 A review of silicon microphones Sensors Actuators A 4 1-11
5. Cho S T, Najafi K and Wise K D 1992 Internal stress compensation and scaling in ultra-sensitive silicon pressure sensors IEEE Trans. Electron Devices ED-39 836-42
6. Spiering V L, Bouwstra S, Spiering R M E J and Elwenspoek M 1991 On-chip decoupling zone for package-stress reduction Dig. Tech. Papers Transducers'91 (San Francisco, CA, 1991) pp 986-9
7. Zou Q, Li Z and Liu L 1996 Design and fabrication of single wafer silicon condenser microphone using corrugated diaphragms J. Microelectromech. Syst. 5 197-204
8. Zou Q, Li Z and Liu L Theoretical and experimental studies of single chip processes miniature silicon condenser microphone with corrugated diaphragm Sensors Actuators at press
9. Scheeper P R, Olthuis W and Bergveld P 1994 The design, fabrication and testing of corrugated silicon nitride diaphragms J. Microelectromech. Syst. 3 36-42
10. Zhang Y and Wise K D 1994 Performance of non-planar silicon diaphragms under large deflections J. Microelectromech. Syst. 3 59-68