Design, simulation and evaluation of novel corrugated diaphragms based on backside sacrificial layer etching technique

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4601, Issue , 2001, Pages 79-83

  Chen, Jing ^a   Liu, Litian ^a   Li, Zhijian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Corrugated diaphragm; Couple field analysis; FEA; ICP; MEMS; Sacrificial etching

Indexed keywords

ANISOTROPY; COMPUTER SIMULATION; COMPUTER SOFTWARE; DIAPHRAGMS; ETCHING; FINITE ELEMENT METHOD; INDUCTIVELY COUPLED PLASMA; MICROMACHINING; MICROPROCESSOR CHIPS;

SCARIFICIAL LAYER ETCHING (SLE) TECHNIQUES;

MICROELECTROMECHANICAL DEVICES;

EID: 0035771672     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.444736     Document Type: Conference Paper

References (6)

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2. Chen Jing, Liu Litian, Li Zhijian, et al., "Design and fabrication of a silicon miniature condenser microphone", Chinese Journal of Acoustics 20, pp. 130-138, 2001.
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