Microwork transfer system in nano manufacturing world

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3202, Issue , 1998, Pages 147-156

  Tsuchiya, Kensuke ^a   Nakao, Masayuki ^a   Okusa, Takenori ^a   Hatamura, Yotaro ^a   Matsumoto, Kiyoshi ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Micromachine; Post machining; Transfer

Indexed keywords

AGILE MANUFACTURING SYSTEMS; BEARINGS (STRUCTURAL); COMPOSITE MICROMECHANICS; FABRICATION; MAGNETIC HEADS; MAGNETIC RECORDING; MANUFACTURE; MICROSYSTEMS; PALLETS; PROBABILITY DENSITY FUNCTION;

INTEGRATED MANUFACTURING; INTEGRATED MANUFACTURING SYSTEMS; MACHINING PROCESS; MICRO-FORCE SENSORS; MICROMACHINE; MICROMACHINES; NANO-MANUFACTURING; POSITIONING ERRORS; POST-MACHINING; ROTATIONAL FLUCTUATIONS; SHAPING PROCESS; SLIDE BEARINGS; SUB MICRONS; TRANSFER; TRANSFER SYSTEMS; TRANSFER YIELDS; WORK PIECES;

MACHINING;

EID: 58849092223     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.298032     Document Type: Conference Paper

References (5)

1. Y. Hatamura, et al.; "Construction of Nano Manufacturing World", Microsystems Technologies, 1-3, 155, 1995
2. M. Nakao, et al.; "Tabletop factory to fabricate 3D microstructures, nano manufacturing world", SPIE Vol. 2906/58, 1996
3. M. Nakao, et al.; "Structure and Working Characteristic of Concentrated Motion Manipulator in Nano Manufacturing World", Proc. of JSME, 95-l(iv), 277, 1995
4. M. Nakao, et al.; "Micro Assembly in Vacuum under SEM", Proc. of JSME, 95-l(iv), 285, 1995
5. M. Nakao, et al.; "Image-Driven Operation System for the Nano Manufacturing World", Proc. of SPIE '96, 1996