Detailed evaluation of the analytical resolution function

Applied Surface Science

Volumn 203-204, Issue , 2003, Pages 268-272

  Wittmaack, K ^a  

^a INSTITUTE OF EPIDEMIOLOGY   (Germany)

Author keywords

Delta doping; Gaussian broadening; Resolution function; Upslope length

Indexed keywords

APPROXIMATION THEORY; DIFFUSION; DOPING (ADDITIVES); FUNCTION EVALUATION; SECONDARY ION MASS SPECTROMETRY;

ANALYTICAL RESOLUTION FUNCTIONS (ARF);

SOLID STATE PHYSICS;

EID: 0037437852     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00644-X     Document Type: Conference Paper

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