Leakage currents in high-permittivity thin films

Applied Physics Letters

Volumn 82, Issue 5, 2003, Pages 781-783

  Schroeder, Herbert ^a   Schmitz, Sam ^a   Meuffels, Paul ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; ELECTRODES; LEAKAGE CURRENTS; PERMITTIVITY; THERMIONIC EMISSION;

OPTICAL FREQUENCIES;

THIN FILMS;

EID: 0037415932     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1541096     Document Type: Article

References (18)

1. D. E. Kotecki, J. D. Baniecki, H. Shen, R. B. Laibowitz, K. L. Saenger, J. J. Lian, T. M. Shaw, S. D. Athavale, C. Cabral, P. R. Duncombe, M. Gutsche, G. Kunkel, Y.-J. Park, Y.-Y. Wang, and R. Wise, IBM J. Res. Dev. 43, 367 (1999).
2. G. W. Dietz, M. Schumacher, R. Waser, S. K. Streiffer, C. Basceri, and A. I. Kingon, J. Appl. Phys. 82, 2359 (1997).
3. G. W. Dietz and R. Waser, Thin Solid Films 299, 53 (1997).
4. J. C. Shin, J. Park, C. S. Hwang, and H. J. Kim, J. Appl. Phys. 86, 506 (1999).
5. K. Watanabe, A. J. Hartmann, R. N. Lamb, and J. F. Scott, Integr. Ferroelectr. 21, 241 (1998).
6. S. Saha and S. B. Krupanidhi, Appl. Phys. Lett. 79, 111 (2001).
7. J. J. O'Dwyer, The Theory of Electrical Conduction and Breakdown in Solid Dielectrics (Clarendon, Oxford, 1973).
8. S. M. Sze, Physics of Semiconductor Devices, 2nd ed. (Wiley, New York, 1981).
9. S. Zafar, R. E. Jones, B. Jiang, B. White, V. Kaushik, and S. Gillespie, Appl. Phys. Lett. 73, 3533 (1998).
10. C. Zhou and D. W. Newns, J. Appl. Phys. 82, 3081 (1997).
11. J. D. Baniecki, R. B. Laibowitz, T. M. Shaw, C. Parks, J. Lian, H. Xu, and Q. Y. Ma, J. Appl. Phys. 89, 2873 (2001).
12. I. Denk, W. Münch, and J. Maier, J. Am. Ceram. Soc. 78, 3265 (1995).
13. C. R. Crowell and S. M. Sze, Solid-State Electron. 9, 1035 (1966).
14. C. R. Crowell and M. Beguwala, Solid-State Electron. 14, 1149 (1971).
15. T. R. Brumleve and R. P. Buck, J. Electroanal. Chem. 90, 1 (1978).
16. S. Schmitz, Thesis, RWTH Aachen (Germany), 2002; Reports of the Research Center Jülich GmbH, JÜL-4006, October 2002.
17. P. Ehrhart, F. Fitsilis, S. Regnery, C. L. Jia, H. Z. Jin, R. Waser, F. Schienle, M. Schnmacher, and H. Juergensen, Mater. Res. Soc. Symp. Proc. 655, CC9.4.1 (2001).
18. J. F. Scott, Jpn. J. Appl. Phys., Part 1 38, 2272 (1999).