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Journal of Physics Condensed Matter

Volumn 15, Issue 12, 2003, Pages 1935-1942

Comparison of the thermal stabilities of NiSi films in Ni/Si, Ni/Pd/Si and Ni/Pt/Si systems

(2) Wang, R N a Feng, J Y a

a TSINGHUA UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPOSITION EFFECTS; CRYSTAL ORIENTATION; HIGH TEMPERATURE EFFECTS; INTERFACIAL ENERGY; LATTICE CONSTANTS; NICKEL COMPOUNDS; NUCLEATION; REDUCTION; SILICON COMPOUNDS; SUBSTRATES; THERMODYNAMIC STABILITY;

INTERLAYER MATERIALS; NICKEL SILICIDES; VEGARD LAW;

SOLID SOLUTIONS;

EID: 0037414211 PISSN: 09538984 EISSN: None Source Type: Journal
DOI: 10.1088/0953-8984/15/12/310 Document Type: Article

Times cited : (27)

References (20)

1
- 36449003528
- Kittl J A, Prinslow D A, Apte P P and Pas M F 1995 Appl. Phys. Lett. 67 2308
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2308
- Kittl, J.A.¹ Prinslow, D.A.² Apte, P.P.³ Pas, M.F.⁴

2
- 0000988870
- Zhang S L, Lavoie C, Cabral C, Harper J M, D'Heurle F M and Jordan-Sweet J 1999 J. Appl. Phys. 85 2617
- (1999) J. Appl. Phys. , vol.85 , pp. 2617
- Zhang, S.L.¹ Lavoie, C.² Cabral, C.³ Harper, J.M.⁴ D'Heurle, F.M.⁵ Jordan-Sweet, J.⁶

3
- 36449009080
- Saenger K L, Cabral J C, Clevenger L A, Roy R A and Wind S 1995 J. Appl. Phys. 78 7040
- (1995) J. Appl. Phys. , vol.78 , pp. 7040
- Saenger, K.L.¹ Cabral, J.C.² Clevenger, L.A.³ Roy, R.A.⁴ Wind, S.⁵

4
- 0030086048
- Colgan E G, Gambino J P and Hong Q Z 1996 Mater. Sci. Eng. R 16 43
- (1996) Mater. Sci. Eng. R , vol.16 , pp. 43
- Colgan, E.G.¹ Gambino, J.P.² Hong, Q.Z.³

5
- 0027703140
- Maex K 1993 Mater. Sci. Eng. 11 53
- (1993) Mater. Sci. Eng. , vol.11 , pp. 53
- Maex, K.¹

6
- 33645041147
- Beyers R and Sinclair R 1985 J. Appl. Phys. 57 5240
- (1985) J. Appl. Phys. , vol.57 , pp. 5240
- Beyers, R.¹ Sinclair, R.²

7
- 0001111214
- Ma Z and Allen L H 1994 Phys. Rev. B 49 13501
- (1994) Phys. Rev. B , vol.49 , pp. 13501
- Ma, Z.¹ Allen, L.H.²

8
- 0029310051
- Morimoto T et al 1995 IEEE Trans. Electron Devices 42 915
- (1995) IEEE Trans. Electron Devices , vol.42 , pp. 915
- Morimoto, T.¹

9
- 0344462733
- Julies B A, Knoesen D, Pretorius R and Adams D 1999 Thin Solid Films 347 201
- (1999) Thin Solid Films , vol.347 , pp. 201
- Julies, B.A.¹ Knoesen, D.² Pretorius, R.³ Adams, D.⁴

10
- 0032620901
- Mangelinck D, Dai J Y, Pan J S and Lahri S K 1999 Appl. Phys. Lett. 75 1736
- (1999) Appl. Phys. Lett. , vol.75 , pp. 1736
- Mangelinck, D.¹ Dai, J.Y.² Pan, J.S.³ Lahri, S.K.⁴

11
- 0033893273
- Poon M C, Deng F, Chan M, Chan W Y and Lau S S 2000 Appl. Surf. Sci. 157 29
- (2000) Appl. Surf. Sci. , vol.157 , pp. 29
- Poon, M.C.¹ Deng, F.² Chan, M.³ Chan, W.Y.⁴ Lau, S.S.⁵

12
- 0033879707
- Tsai C J, Chung P L and Yu K H 2000 Thin Solid Films 365 72
- (2000) Thin Solid Films , vol.365 , pp. 72
- Tsai, C.J.¹ Chung, P.L.² Yu, K.H.³

13
- 0033361221
- Cheng L W, Chang S L, Chen J Y, Chen L J and Tsui B Y 1999 Thin Solid Films 356 412
- (1999) Thin Solid Films , vol.356 , pp. 412
- Cheng, L.W.¹ Chang, S.L.² Chen, J.Y.³ Chen, L.J.⁴ Tsui, B.Y.⁵

14
- 0032157593
- Poon M C, Chan M, Zhang W Q, Deng F and Lau S S 1998 Microelectron. Reliab. 38 1499
- (1998) Microelectron. Reliab. , vol.38 , pp. 1499
- Poon, M.C.¹ Chan, M.² Zhang, W.Q.³ Deng, F.⁴ Lau, S.S.⁵

15
- 0036132997
- Lee P S, Mangelinck D, Pey K L, Ding J, Chi D Z, Osipowicz T, Dai J Y and See A 2002 Microelectron. Eng. 60 171
- (2002) Microelectron. Eng. , vol.60 , pp. 171
- Lee, P.S.¹ Mangelinck, D.² Pey, K.L.³ Ding, J.⁴ Chi, D.Z.⁵ Osipowicz, T.⁶ Dai, J.Y.⁷ See, A.⁸

16
- 0001390971
- Liu J F, Chen H B, Feng J Y and Zhu J 2000 Appl. Phys. Lett. 77 2177
- (2000) Appl. Phys. Lett. , vol.77 , pp. 2177
- Liu, J.F.¹ Chen, H.B.² Feng, J.Y.³ Zhu, J.⁴

17
- 0034159556
- Lee P S, Mangelinck D, Pey K L, Shen Z X, Ding J, Osipowicz T and See A 2000 Electrochem. Solid State Lett. 3 153
- (2000) Electrochem. Solid State Lett. , vol.3 , pp. 153
- Lee, P.S.¹ Mangelinck, D.² Pey, K.L.³ Shen, Z.X.⁴ Ding, J.⁵ Osipowicz, T.⁶ See, A.⁷

18
- 0021444627
- D'Heurle F M, Peterson C S, Baglin J E E, La Placa S J and Wong C Y 1984 J. Appl. Phys. 55 4208
- (1984) J. Appl. Phys. , vol.55 , pp. 4208
- D'Heurle, F.M.¹ Peterson, C.S.² Baglin, J.E.E.³ La Placa, S.J.⁴ Wong, C.Y.⁵

19
- 51249173803
- Baxi H C and Massalski T B 1991 J. Phase Equilib. 12 349
- (1991) J. Phase Equilib. , vol.12 , pp. 349
- Baxi, H.C.¹ Massalski, T.B.²

20
- 79956059055
- Liu J F, Feng J Y and Zhu J 2002 Appl. Phys. Lett. 80 270
- (2002) Appl. Phys. Lett. , vol.80 , pp. 270
- Liu, J.F.¹ Feng, J.Y.² Zhu, J.³

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