Capacitance-voltage measurements on ultrathin gate dielectrics

Solid-State Electronics

Volumn 47, Issue 5, 2003, Pages 801-805

  Norton, David P ^a  

^a University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; ULTRATHIN FILMS;

GATE DIELECTRICS;

GATES (TRANSISTOR);

EID: 0037406949     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(02)00340-4     Document Type: Article

References (12)

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