SCOPUS 정보 검색 플랫폼

MRS Bulletin

Volumn 27, Issue 3, 2002, Pages 212-216

Issues in high-κ gate stack interfaces

(3) Misra, Veena a Lucovsky, Gerry a Parsons, Gregory a

a NONE

Author keywords

Gate stacks; High dielectric constant materials; High dielectrics; Interface reactions; Metal gates

Indexed keywords

BONDING; COMPOSITION; DIELECTRIC MATERIALS; ELECTRIC INSULATORS; ELECTRONIC STRUCTURE; FILM GROWTH; GATES (TRANSISTOR); PERMITTIVITY; REACTION KINETICS; SILICON; THERMODYNAMIC PROPERTIES;

DIELECTRIC STACKS; GATE ELECTRODES; HIGH DIELECTRIC CONSTANT GATE STACK INTERFACES; METALLIC GATES;

INTERFACES (MATERIALS);

EID: 0036501118 PISSN: 08837694 EISSN: None Source Type: Journal
DOI: 10.1557/mrs2002.73 Document Type: Article

Times cited : (88)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.