The effect of strain on abnormal grain growth in Cu thin films

Journal of Electronic Materials

Volumn 32, Issue 4, 2003, Pages 261-267

  Moriyama, M ^a   Matsunaga, K ^a   Murakami, Masanori ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Cu film; Grain growth; Strain; Stress

Indexed keywords

ELECTRIC CONDUCTIVITY; GRAIN GROWTH; MICROSTRUCTURE; SPUTTER DEPOSITION; STRAIN; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

ELECTROMIGRATION RESISTANCE;

THIN FILMS;

EID: 0037395337     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-003-0219-7     Document Type: Article

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