Microstructural characterization of MgO thin films grown by radio-frequency sputtering. Target and substrate-temperature effect

Journal of Applied Physics

Volumn 93, Issue 7, 2003, Pages 4300-4305

  Caceres, D ^a   Vergara, I ^a   Gonzalez R ^a  

^a UNIVERSIDAD CARLOS III DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; MAGNESIA; MAGNETRON SPUTTERING; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

NANOIDENTATION;

THIN FILMS;

EID: 0037392759     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1558964     Document Type: Article

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