Sputtering and in-plane texture control during the deposition of MgO

Journal of Applied Physics

Volumn 89, Issue 7, 2001, Pages 4105-4112

  Dong, Liang ^a   Zepeda Ruiz, Luis A ^b   Srolovitz, David J ^b  

^a CADENCE DESIGN SYSTEMS   (United States)

^b Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035309001     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1354650     Document Type: Article

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