Application of multi-step formation during molecular beam epitaxy for fabricating novel nanomechanical structures

Journal of Crystal Growth

Volumn 251, Issue 1-4, 2003, Pages 281-284

  Yamaguchi, Hiroshi ^a   Hirayama, Yoshiro ^a,b  

^a Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

A3. Molecular beam epitaxy; B2. Semiconducting III V materials

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROMECHANICAL DEVICES; IMAGING TECHNIQUES; MOLECULAR BEAM EPITAXY; SELF ASSEMBLY; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR GROWTH; SEMICONDUCTOR SUPERLATTICES;

MULTI-STEP FORMATION;

NANOSTRUCTURED MATERIALS;

EID: 0037380494     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(02)02318-7     Document Type: Conference Paper

References (17)

1. M.L. Roukes, Technical Digest of the 2000 Solid-State Sensor and Actuator Workshop, 2000, p. 1.
2. Craighead H.G. Science. 290:2000;1532.
3. A.N. Cleland, M.L. Roukes, in: 24th International Conference on the Physics of Semiconductors, World Scientific, Singapore, 1999.
4. Carr S.M., Lawrence W.E., Wybourne M.N. Phys. Rev. B. 64:2001;220101.
5. Armour A.D., Blencowe M.P., Schwab K.C. Phys. Rev. Lett. 88:2002;148301.
6. Yamaguchi H., Hirayama Y. Appl. Phys. Lett. 80:2002;4428.
7. Torii S., Bando K., Shim B.R., Maehashi K., Nakashima H. Jpn. J. Appl. Phys. 38:1999;4673.
8. Belk J.G., Sudijono J.L., Zhang X.M., Neave J.H., Jones T.S., Joyce B.A. Phys. Rev. Lett. 78:1997;475.
9. Shiraishi K., Oyama N., Okajima K., Miyagishima N., Takeda K., Yamaguchi H., Ito T., Ohno T. J. Crystal Growth. 237-239:2002;206.
10. Namatsu H., Yamazaki K., Kurihara K. Microelectron. Eng. 46:1999;129.
11. Heine V. Phys. Rev. A. 138:1965;1689.
12. Tersoff J. Phys. Rev. Lett. 52:1984;465.
13. Yamaguchi H., Dreyfus R., Hirayama Y., Miyashita S. Appl. Phys. Lett. 78:2001;2372.
14. Yamaguchi H., Hirayama Y. Jpn. J. Appl. Phys. 37:1998;1599.
15. Yamaguchi H., Sudijono J.L., Joyce B.A., Jones T.S., Gatzke C., Stradling R.A. Phys. Rev. B. 58:1998;R4219.
16. Maivald P., Butt H.J., Gould S.A.C., Prater C.B., Drake B., Gurley J.A., Elings V.B., Hansma P.K. Nanotechnology. 2:1991;103.
17. R. Biesendanger, Scanning Probe Microscopy and Spectroscopy, Cambridge University Press, Cambridge, 1994, p. 240.