High-energy capacitance electrostatic micromotors

Journal of Micromechanics and Microengineering

Volumn 13, Issue 2, 2003, Pages 190-200

  Baginsky, I L ^a   Kostsov, E G ^a  

^a INSTITUTE OF AUTOMATION AND ELECTROMETRY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTROSTATICS; FERROELECTRIC MATERIALS; MICROELECTRONICS;

MICROMOTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037340986     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/2/305     Document Type: Article

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