Electromechanical energy converters of micromechanic devices on the basis of ferroelectric films

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 405, Issue 2-3, 1998, Pages 511-513

  Dyatlov, V L ^a   Kostsov, E G ^b  

^a SOBOLEV INSTITUTE OF MATHEMATICS   (Russian Federation)

^b INSTITUTE OF AUTOMATION AND ELECTROMETRY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; ELECTROSTATICS; ENERGY CONVERSION; FERROELECTRIC MATERIALS; METALLIC FILMS;

ELECTROMECHANICAL ENERGY CONVERTERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032507185     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(97)00152-6     Document Type: Article

References (8)

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8. W. Lavrinenko, I.A. Kartashov and V.S. Vishevskii, Piezoelectric motors, M.: Energy (1980) 112.