Electrostatically driven linear micro-actuators: FE analysis and fabrication

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 204-209

  Zappe, S ^a   Baltzer, M ^a   Kraus, Th ^a   Obermeier, E ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTROSTATIC DEVICES; FINITE ELEMENT METHOD; GROUNDING ELECTRODES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

LOW PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD); MICROACTUATORS;

ACTUATORS;

EID: 0031220947     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/033     Document Type: Article

References (7)

1. Robbins W P, Polla D L, Tamagawa T, Glumac D E and Tihen W 1991 Design of linear-motion microactuators using piezoelectric thin films J. Micromech. Microeng, 1 (4) 247-52
2. Ataka M, Omadaka A and Fujita H 1993 A biomimetic micro motion system - A ciliary motion system Proc. Transducers '93, 7th Int. Conf. Solid-State Sensors and Actuators (Yokohama, Japan) (Institute of Electrical Engineers of Japan) pp 38-41
3. Wagner B, Kreutzer M and Bennecke W 1992 Linear and rotational magnetic micromotors fabricated using silicon technology Proc. IEEE Micro Electr. Mech. Sys. (7) 183-9
4. Kowanz B, Bacher W, Bley P and Ehrfeld W 1992 Linear driving device for micro-actuators MME '90, Micromechanics Europe 1990, Proc. 2nd Workshop on Micromachining, Micromechanics and Microsystems (Berlin, Germany) (IEEE) pp 152-6
5. Kozlowski F, Lindmair N, Scheiter Th, Hierold C and Lang W 1995 A novel method to avoid sticking of surface micromachined structures Proc. 8th Int. Conf. Solid-State Sensors and Actuators, Eurosensors IX (Stockholm, Sweden) vol 1 (Stockholm: Foundation for Sensor and Actuator Technology) pp 220-3
6. Fricke J and Obermeier E 1995 Surface micromachined accelerometer based on a torsional moving structure Proc. 8th Int. Conf. Solid-State Sensors and Actuators, Eurosensors IX, (Stockholm, Sweden) vol 2 (Stockholm: Foundation for Sensor and Actuator Technology) pp 542-5
7. Maier-Schneider D, Köprülülü A, Ballhausen Holm S and Obermeir E 1996 Elastic properties and microstructure of LPCVD polysilicon films J. Micromech. Microeng. 6 436-46