Planar electrostatic micromotors on the basis of the ferroelectric films

Integrated Ferroelectrics

Volumn 23, Issue 1, 1999, Pages 149-160

  Dyatlov, V L ^a   Kostsov, E G ^b  

^a SOBOLEV INSTITUTE OF MATHEMATICS   (Russian Federation)

^b INSTITUTE OF AUTOMATION AND ELECTROMETRY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRIC MOTORS; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS;

FERROELECTRIC FILMS; FERROELECTRIC SURFACE; MICROMOTORS;

FERROELECTRIC MATERIALS;

EID: 0033294326     PISSN: 10584587     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/10584589908210146     Document Type: Article

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