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Volumn , Issue 5, 1999, Pages 3-22
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High efficient electrostatic micromotors on the base of thin ferroelectric films
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC MOTORS;
FERROELECTRIC MATERIALS;
MICROELECTRONICS;
STEPPING MOTORS;
THIN FILM DEVICES;
ELECTROSTATIC MICROMOTORS;
MICROELECTROMECHANICAL DEVICES;
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EID: 0033131114
PISSN: 00052310
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (5)
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References (18)
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