Spectral interferometric microscope with tandem liquid-crystal Fabry-Perot interferometers for extension of the dynamic range in three-dimensional step-height measurement

Applied Optics

Volumn 42, Issue 4, 2003, Pages 682-690

  Mehta, Dalip Singh ^a   Hinosugi, Hideki ^a   Saito, Shohei ^a   Takeda, Mitsuo ^a   Kurokawa, Takashi ^b   Takahashi, Hideki ^c   Ando, Masahito ^c   Shishido, Masataka ^c   Yoshizawa, Tetsuo ^c  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

^b TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

^c YAZAKI CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT EMITTING DIODES; LIGHT TRANSMISSION; LIQUID CRYSTALS; MICROSCOPES; STEEL;

SPECTRAL INTERFERENCE MICROSCOPES;

FABRY-PEROT INTERFEROMETERS;

EID: 0037327952     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.000682     Document Type: Article

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