Surface shape measurement by wavelength scanning interferometry using an electronically tuned Ti:sapphire laser

Optical Review

Volumn 8, Issue 1, 2001, Pages 59-63

  Yamamoto, Akihiro ^a   Kuo, Chih Che ^a   Sunouchi, Kei ^a   Wada, Satoshi ^a   Yamaguchi, Ichirou ^a   Tashiro, Hideo ^a  

^a RIKEN   (Japan)

Author keywords

High speed CCD camera; Image processing; Profilometry; Tunable laser; Wavelength scanning interferometry

Indexed keywords

EID: 0035591919     PISSN: 13406000     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10043-001-0059-8     Document Type: Article

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