Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging with a spectral interferometric microscope

Applied Optics

Volumn 41, Issue 19, 2002, Pages 3874-3885

  Mehta, Dalip Singh ^a   Sugai, Masaya ^a   Hinosugi, Hideki ^a   Saito, Shohei ^a   Takeda, Mitsuo ^a   Kurokawa, Takashi ^b   Takahashi, Hideki ^c   Ando, Masahito ^c   Shishido, Masataka ^c   Yoshizawa, Tetsuo ^c  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

^b TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

^c YAZAKI CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARTICLE; PHASE CONTRAST MICROSCOPY; SIGNAL PROCESSING; THEORETICAL MODEL; THREE DIMENSIONAL IMAGING; TOMOGRAPHY;

IMAGING, THREE-DIMENSIONAL; MICROSCOPY, INTERFERENCE; MODELS, THEORETICAL; SIGNAL PROCESSING, COMPUTER-ASSISTED; TOMOGRAPHY;

FABRY-PEROT INTERFEROMETERS; FOURIER TRANSFORMS; LIGHT INTERFERENCE; LUMINESCENT DEVICES; MICROSCOPES; PHOTODIODES; TOMOGRAPHY;

FREQUENCY-SCANNING DEVICES; SUPERLUMINESCENT DIODES (SLD);

IMAGING TECHNIQUES;

EID: 0036628533     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.003874     Document Type: Article

References (21)

1. G. E. Sommergren, “Optical heterodyne interferometry,” Appl. Opt. 20, 610-618 (1981).
2. K. Creath, “Phase-shifting interferometry techniques,” in Progress in Optics, E. Wolf, ed. (Elsevier, New York,1988), Vol. 26, pp. 357-373.
3. B. S. Lee and T. C. Strand, “Profilometry with a coherence scanning microscope,” Appl. Opt. 29, 3784-3788 (1990).
4. T. Dressel, G. Hausler, and H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt. 31, 919-925 (1992).
5. L. Deck and P. De Groot, “High-speed noncontact profiler based on scanning white-light interferometry,” Appl. Opt. 33, 7334-7338 (1994).
6. D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178-1181 (1991).
7. S. R. Chinn, E. A. Swanson, and J. G. Fujimoto, “Optical coherence tomography using a frequency-tunable optical source,” Opt. Lett. 22, 340-342 (1997).
8. M. Suematsu and M. Takeda, “Wavelength-shift interferometry for distance measurements using the Fourier transform technique for fringe analysis,” Appl. Opt. 30, 4046-4055 (1991).
9. M. Takeda and H. Yamamoto, “Fourier-transform speckle pro-filometry: three-dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces,” Appl. Opt. 33, 7829-7837 (1994).
10. H. J. Tiziani, B. Franze, and P. Haible, “Wavelength-shift speckle interferometry for absolute profilometry using modehope free external cavity diode laser,” J. Mod. Opt. 44, 1485-1496 (1997).
11. S. Kuwamura and I. Yamaguchi, “Wavelength scanning pro-filometry for real-time surface shape measurement,” Appl. Opt. 36, 4473-4482 (1997).
12. A. Yamamoto, C. C. Kuo, K. Sunouchi, S. Wada, I. Yamaguchi, and H. Tashiro, “Surface shape measurement by wavelength scanning interferometry using an electronically tuned Ti:sap-phire laser,” Opt. Rev. 8, 59-63 (2001).
13. M. K. Kim, “Wavelength-scanning digital interference holography for optical section imaging,” Opt. Lett. 24, 1693-1695 (1999).
14. A. F. Fercher, C. K. Hitzenberger, M. Sticker, E. Moreno-Barriuso, R. Leitgeb, W. Drexler, andH. Sattmann, “A thermal light source technique for optical coherence tomography,” Opt. Commun. 185, 57-64 (2000).
15. M. Kinoshita, M. Takeda, H. Yago, Y. Watanabe, and T. Ku-rokawa, “Optical frequency-domain microprofilometry with a frequency-tunable liquid-crystal Fabry-Perot etalon device,” Appl. Opt. 38, 7063-7068 (1999).
16. M. Takeda, H. Ina, and S. Kobayashi, “Fourier transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72, 156-160 (1982).
17. T. H. Barnes, T. Eiju, and K. Matsuda, “Rough surface profile measurement using speckle optical frequency domain reflec-tometry with an external cavity tunable diode laser,” Optik 103, 93-100 (1996).
18. H. Tsuda, K. Hirabayashi, T. Tohmori, and T. Kurokawa, “Tunable light source using a liquid-crystal Fabry-Perot interferometer,” IEEE Photon. Technol. Lett. 3, 504-506 (1991).
19. K. Hirabayashi, H. Tsuda, and T. Kurokawa, “Tunable liquid-crystal Fabry-Perot interferometer filter for wavelength-division multiplexing communication systems,” J. Lightwave Technol. 11, 2033-2043 (1993).
20. S. A. Kingsley and D. E. Davies, “OFDR diagnostics for fiber and integrated-optics systems,” Electron. Lett. 21, 434-435 (1985).
21. H. Hiratsuka, E. Kido, and T. Yoshimura, “Simultaneous measurements of three-dimensional reflectivity distributions in scattering media based on optical frequency-domain reflecto-metry,” Opt. Lett. 23, 1420-1422 (1998)