Thermal decomposition and desorption of diethylamido of tetrakis(diethylamido)zirconium (TDEAZr) on Si(100)

Surface Review and Letters

Volumn 10, Issue 1, 2003, Pages 121-125

  Jeong, Joonhee ^a   Lim, Sungwon ^a   Yong, Kijung ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Si(100); Tetrakis(diethylamido)zirconium; Thermal decomposition; TPD

Indexed keywords

DESORPTION; HYDROGEN; ORGANIC COMPOUNDS; SILICON; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

REACTION PATHWAY;

PYROLYSIS;

METAL OXIDE; SILICON; TETRAKIS(DIETHYLAMIDO)ZIRCONIUM; UNCLASSIFIED DRUG; ZIRCONIUM DERIVATIVE;

ARTICLE; DECOMPOSITION; ENERGY; SEMICONDUCTOR; TEMPERATURE; THERMAL ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0037322350     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218625X03004706     Document Type: Article

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