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Applied Physics A: Materials Science and Processing

Volumn 74, Issue 1, 2002, Pages 41-45

Young's modulus and density of nanocrystalline cubic boron nitride films determined by dispersion of surface acoustic waves

(6) Lehmann, G a Hess, P a Weissmantel, S b Reisse, G b Scheible, P c Lunk, A c

a UNIVERSITY OF HEIDELBERG (Germany)

b UNIVERSITY OF APPLIED SCIENCES MITTWEIDA (Germany)

c UNIVERSITY OF STUTTGART (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; DEPOSITION; ELASTIC MODULI; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; SILICON;

BORON NITRIDE; BUFFER LAYERS; EVAPORATION DEVICES; SURFACE ACOUSTIC WAVES;

BORON COMPOUNDS;

EID: 0005059127 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390100897 Document Type: Review

Times cited : (19)

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