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Journal of the Korean Physical Society

Volumn 42, Issue SUPPL.2, 2003, Pages

ICP etching of Pt thin films for fabrication of SAW devices

(3) Lee, Taek Joo a Song, Ho Young a Chung, Duck Jin a

a Inha University (South Korea)

Author keywords

Pt thin film, Cl2 Ar O2 plasma; SAW devices; TCP

Indexed keywords

EID: 0037310388 PISSN: 03744884 EISSN: None Source Type: Journal
DOI: None Document Type: Conference Paper

Times cited : (15)

References (17)

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